Integrated optical readout for miniaturization of cantilever-based sensor system

Diffraction-based Integrated Optical Readout for Micromachined Optomechanical Sensors

Parallel optical readout of cantilever arrays in dynamic mode.

Parallel frequency readout of an array of cantilevers is demonstrated using optical beam deflection with a single laser-diode pair. Multi-frequency addressing makes the individual nanomechanical response of each cantilever distinguishable within the received signal. Addressing is accomplished by exciting the array with the sum of all cantilever resonant frequencies. This technique requires cons...

Fabrication, characterization, and simulation of a cantilever-based airflow sensor integrated with optical fiber.

In this paper, we present the fabrication and packaging of a cantilever-based airflow sensor integrated with optical fiber. The sensor consists of a micro Fabry-Perot (FP) cavity including a fiber and a micro cantilever that is fabricated using the photolithography method. Airflow causes a small deflection of the micro cantilever and changes the cavity length of the FP, which makes the fringe s...

Indium phosphide-based monolithically integrated PIN waveguide photodiode readout for resonant cantilever sensors

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Microfluidic flow rate detection based on integrated optical fiber cantilever.

We demonstrate an integrated microfluidic flow sensor with ultra-wide dynamic range, suitable for high throughput applications such as flow cytometry and particle sorting/counting. A fiber-tip cantilever transduces flow rates to optical signal readout, and we demonstrate a dynamic range from 0 to 1500 microL min(-1) for operation in water. Fiber-optic sensor alignment is guided by preformed mic...